Each of the three largest U.S. chip equipment makers - Applied Materials, Lam Research and KLA - may suffer a loss of roughly $350 million over a year related to the tariffs, the sources said. Smaller rivals such as Onto Innovation may also face tens of millions of dollars in extra spending.
The companies build some of the world's most highly sought-after chipmaking equipment that can require thousands of specialized parts.
The Trump administration has largely paused the reciprocal tariffs it announced in April. But to spur more U.S. manufacturing, it is weighing further duties on the chip industry and initiated a probe into their imports on Monday.
Lawmakers and administration officials discussed the tariff costs with chip industry executives and officials from SEMI, an international trade group, as part of an ongoing dialogue.
The early, rough estimate of $350 million per company could change as the Trump administration's duties take effect. Quick calculations are hard to make because each chipmaking tool has multiple components, and the ultimate tariff regime is unclear.
The U.S. export controls have spurred China to invest in its domestic chip equipment industry.
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